Evidence map›Paper›PMID 35629859›Full record

ArticleMembranes2022

Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications.

Millicent N Gikunda, Ferdinand Harerimana, James M Mangum, Sumaya Rahman, Joshua P Thompson, Charles Thomas Harris, Hugh O H Churchill, Paul M Thibado

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Membranes, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.

0numbers the graph read from it
0cells of the map it votes in
3citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

3 citing papers in PubMed.

  1. Article
  2. Article
  3. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

Millicent N GikundaDepartment of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Ferdinand HarerimanaDepartment of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
James M MangumDepartment of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Sumaya RahmanDepartment of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Joshua P ThompsonDepartment of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Charles Thomas HarrisSandia National Laboratories, Albuquerque, NM 87123, USA.
Hugh O H ChurchillDepartment of Physics, University of Arkansas, Fayetteville, AR 72701, USA.
Paul M ThibadoDepartment of Physics, University of Arkansas, Fayetteville, AR 72701, USA.ORCID 0000-0003-1959-1130

Funding

Walton Family Foundation RG3178
6 · The paper itself

Abstract

Highly flexible, electrically conductive freestanding graphene membranes hold great promise for vibration-based applications. This study focuses on their integration into mainstream semiconductor manufacturing methods. We designed a two-mask lithography process that creates an array of freestanding graphene-based variable capacitors on 100 mm silicon wafers. The first mask forms long trenches terminated by square wells featuring cone-shaped tips at their centers. The second mask fabricates metal traces from each tip to its contact pad along the trench and a second contact pad opposite the square well. A graphene membrane is then suspended over the square well to form a variable capacitor. The same capacitor structures were also built on 5 mm by 5 mm bare dies containing an integrated circuit underneath. We used atomic force microscopy, optical microscopy, and capacitance measurements in time to characterize the samples.

Indexed as

atomic force microscopycritical point dryinggraphenegraphene transferintegrated circuitphotolithographyvariable capacitorwet etching

Identifiers

PMID35629859
PMCPMC9147771

What OpenQuestion holds

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LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.