ArticleScience advances2022
Photolithographic realization of target nanostructures in 3D space by inverse design of phase modulation.
Article in Science advances, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 9 papers.
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Who cites it
9 citing papers in PubMed, 23 citations in OpenAlex.
- Suppressing Stitching Errors in Full-Sensor-Plane Color Routers via Optical Structural Similarity.Nanophotonics (Berlin, Germany) · 2026Article
- Full-space inverse-designed meta-optics for complex vector field shaping of intracavity landscapes.Light, science & applications · 2026Article
- Stamping Lithography on Arbitrary Surfaces based on Self-Assembly of Colloidal Particles.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Article
- Nanophotonic device design based on large language models: multilayer and metasurface examples.Nanophotonics (Berlin, Germany) · 2025Article
- Compression-sensitive smart windows: inclined pores for dynamic transparency changes.Nature communications · 2024Article
- Realization of all two-dimensional Bravais lattices with metasurface-based interference lithography.Nanophotonics (Berlin, Germany) · 2024Article
- Rational design of arbitrary topology in three-dimensional spaceNanophotonics (Berlin, Germany) · 2024Article
- Inverse design of high-NA metalens for maskless lithography.Nanophotonics (Berlin, Germany) · 2023Article
- Super-compact universal quantum logic gates with inverse-designed elements.Science advances · 2023Article
Corrections and comments
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Authors and funding
8 authors at 1 institution in 1 country.
Funding
No grant is acknowledged in the PubMed record.
Abstract
The mass production of precise three-dimensional (3D) nanopatterns has long been the ultimate goal of fabrication technology. While interference lithography and proximity-field nanopatterning (PnP) may provide partial solutions, their setup complexity and limited range of realizable structures, respectively, remain the main problems. Here, we tackle these challenges by applying an inverse design to the PnP process. Our inverse design platform based on the adjoint method can efficiently find optimal phase masks for diverse target lattices and motifs. We fabricate a 2D rectangular array of nanochannels, which has not been reported for conventional PnP with normally incident light, as a proof of concept. With further demonstration of material conversion, our work provides versatile platforms for nanomaterial fabrication.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.