ArticleNanomaterials (Basel, Switzerland)2022
Integrated CuO/Pd Nanospike Hydrogen Sensor on Silicon Substrate.
Article in Nanomaterials (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
A large area of randomly distributed nanospike as nanostructured template was induced by femtosecond (fs) laser on a silicon substrate in water. Copper oxide (CuO) and palladium (Pd) heterostructured nanofilm were coated on the nanospikes by magnetron sputtering technology and vacuum thermal evaporation coating technology respectively for the construction of a p-type hydrogen sensor. Compared with the conventional gas sensor based on CuO working at high temperature, nanostructured CuO/Pd heterostructure exhibited promising detection capability to hydrogen at room temperature. The detection sensitivity to 1% H
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