Evidence map›Paper›PMID 35525844›Full record

ArticleScientific reports2022

Single-shot femtosecond bulk micromachining of silicon with mid-IR tightly focused beams.

Evgenii Mareev, Andrey Pushkin, Ekaterina Migal, Kirill Lvov, Sergey Stremoukhov, Fedor Potemkin

Open access · goldAbstract read
In one paragraph

Article in Scientific reports, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
5.3field-weighted citation impact, top 3% of its field
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed, 32 citations in OpenAlex.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors at 1 institution in 1 country.

Evgenii MareevFaculty of Physics, M. V. Lomonosov Moscow State University, Leninskie Gory bld. 1/2, 119991, Moscow, Russia.
Andrey PushkinFaculty of Physics, M. V. Lomonosov Moscow State University, Leninskie Gory bld. 1/2, 119991, Moscow, Russia.
Ekaterina MigalFaculty of Physics, M. V. Lomonosov Moscow State University, Leninskie Gory bld. 1/2, 119991, Moscow, Russia.
Kirill LvovFaculty of Physics, M. V. Lomonosov Moscow State University, Leninskie Gory bld. 1/2, 119991, Moscow, Russia.
Sergey StremoukhovFaculty of Physics, M. V. Lomonosov Moscow State University, Leninskie Gory bld. 1/2, 119991, Moscow, Russia.
Fedor PotemkinFaculty of Physics, M. V. Lomonosov Moscow State University, Leninskie Gory bld. 1/2, 119991, Moscow, Russia. potemkin@physics.msu.ru.
Lomonosov Moscow State University · RU

Funding

Moscow city Government and Russian Foundation for Basic Research 18-02-40018Moscow city Government and Russian Foundation for Basic Research 19-29-12037Moscow city Government and Russian Foundation for Basic Research 21-32-70021Russian Foundation for Basic Research 19-29-12030Russian Science Foundation 17-72-20130
6 · The paper itself

Abstract

Being the second most abundant element on earth after oxygen, silicon remains the working horse for key technologies for the years. Novel photonics platform for high-speed data transfer and optical memory demands higher flexibility of the silicon modification, including on-chip and in-bulk inscription regimes. These are deepness, three-dimensionality, controllability of sizes and morphology of created modifications. Mid-IR (beyond 4 µm) ultrafast lasers provide the required control for all these parameters not only on the surface (as in the case of the lithographic techniques), but also inside the bulk of the semiconductor, paving the way to an unprecedented variety of properties that can be encoded via such an excitation. We estimated the deposited energy density as 6 kJ cm

Identifiers

PMID35525844
PMCPMC9079093
OpenAlexW4229044758

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.