ArticleRSC advances2020
Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments.
Article in RSC advances, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
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Who cites it
5 citing papers in PubMed, 26 citations in OpenAlex.
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- Recent Progress in Flexible Surface Acoustic Wave Sensing Technologies.Micromachines · 2024Review
- Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications.Scientific reports · 2023Article
- FEM Analysis of Various Multilayer Structures for CMOS Compatible Wearable Acousto-Optic Devices.Sensors (Basel, Switzerland) · 2021Article
- Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications.Microsystems & nanoengineering · 2021Article
Corrections and comments
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Authors and funding
10 authors at 3 institutions in 2 countries.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Surface acoustic wave (SAW) devices based on piezoelectric thin-films such as ZnO and AlN are widely used in sensing, microfluidics and lab-on-a-chip applications. However, for many of these applications, the SAW devices will inevitably be used in acid or alkali harsh environments, which may cause their early failures. In this work, we investigated the behavior and degradation mechanisms of thin film based SAW devices in acid and alkali harsh environments. Results show that under the acid and alkali attacks, chemical reaction and corrosion of ZnO devices are very fast (usually within 45 s). During the corrosion, the crystalline orientation of the ZnO film is not changed, but its grain defects are significantly increased and the grain sizes are decreased. The velocity of ZnO-based SAW devices is decreased due to the formation of porous structures induced by the chemical reactions. Whereas an AlN thin-film based SAW device does not perform well in acid-alkali conditions, it might be able to maintain a normal performance without obvious degradation for more than ten hours in acid or alkali solutions. This work could provide guidance for the applications of both ZnO or AlN-based SAW devices in acid/alkali harsh environments.
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Registered trials
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