ArticleMicrosystems & nanoengineering2022
Micromechanical mode-localized electric current sensor.
Article in Microsystems & nanoengineering, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
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Who cites it
7 citing papers in PubMed.
- Giant energy exchange rate in mode-coupled resonators enables supercontinuum mechanical frequency combs.Microsystems & nanoengineering · 2026Article
- Tunable energy transfer in coupled nonlinear MEMS resonators under parametric modulation for enhanced sensor performance.Microsystems & nanoengineering · 2025Article
- Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators.Microsystems & nanoengineering · 2025Article
- Virtually coupled resonators with modal dominance for improved sensitivity and bandwidth.Microsystems & nanoengineering · 2025Article
- Tunable on-chip optical traps for levitating particles based on single-layer metasurface.Nanophotonics (Berlin, Germany) · 2024Article
- A Two-Axis Orthogonal Resonator for Variable Sensitivity Mode Localization Sensing.Sensors (Basel, Switzerland) · 2024Article
- Experimental Investigation of Mode Localization's Bifurcation Topology Transfer in Electrostatically Coupled Tuning Fork Resonators.Sensors (Basel, Switzerland) · 2024Article
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Authors and funding
5 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
This paper outlines the design of a novel mode-localized electric current sensor based on a mechanically sensitive element of weakly coupled resonator systems. With the advantage of a high voltage sensitivity of weakly coupled resonator systems, the current under test is converted to voltage via a silicon shunt resistor, which causes stiffness perturbation to one resonator. The mode-localization phenomenon alters the energy distribution in the weakly coupled resonator system. A theoretical model of current sensing is established, and the performance of the current sensor is determined: the sensitivity of the electric current sensor is 567/A, the noise floor is 69.3 nA/√Hz, the resolution is 183.6 nA, and the bias instability is 81.6 nA. The mode-localized electric current sensor provides a new approach for measuring sub-microampere currents for applications in nuclear physics, including for photocurrent signals and transistor leakage currents. It could also become a key component of a portable mode-localized multimeter when combined with a mode-localized voltmeter. In addition, it has the potential for use in studying sensor arrays to achieve higher resolution.
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Registered trials
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