ArticleSurface and interface analysis : SIA2021
Deep depth profiling using gas cluster secondary ion mass spectrometry: Micrometer topography development and effects on depth resolution.
Article in Surface and interface analysis : SIA, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
2 citing papers in PubMed, 7 citations in OpenAlex.
- Primary activity measurement of an Am-241 solution using microgram inkjet gravimetry and decay energy spectrometry.Metrologia · 2025Article
- Applications of spatially resolved omics in the field of endocrine tumors.Frontiers in endocrinology · 2022Review
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Authors and funding
2 authors at 2 institutions in 1 country.
Funding
Abstract
Secondary ion mass spectrometry using the argon cluster primary ion beam enables molecular compositional depth profiling of organic thin films with minimal loss of chemical information or changes in sputter rate. However, for depth profiles of thicker organic films (> 10 μm of sputtered depth) we have observed the rapid formation of micron-scale topography in the shape of pillars that significantly affect both the linearity of the sputter yield and depth resolution. To minimize distortions in the 3D reconstruction of the sample due to this topography, a step-wise, staggered sample rotation was employed. By using polymer spheres embedded in an organic film, it was possible to measure the depth resolution at the film-sphere interface as a function of sputtered depth and observe when possible distortions in the 3D image occurred. In this way, it was possible to quantitatively measure the effect of micron-scale topography and sample rotation on the quality of the depth profile.
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Registered trials
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