ArticleMicromachines2022
Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
8 citing papers in PubMed.
- Process Optimization and Characterization of Dielectric, Piezoelectric, and Ferroelectric Properties of 30% ScAlN Thin Films.Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society · 2026Article
- Frequency-angle decoupling design for grid-etched piezoelectric MEMS cantilevers and its application to quasi-static micromirrors.Microsystems & nanoengineering · 2026Article
- A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links.Microsystems & nanoengineering · 2025Article
- Design and Fabrication of a Piezoelectric Bimorph Microphone with High Reliability and Dynamic Range Based on AlMicromachines · 2025Article
- Water-Immersible MEMS Mirror with a Large Optical Aperture.Micromachines · 2024Article
- Editorial for the Special Issue on Piezoelectric Transducers: Materials, Devices and Applications, Volume III.Micromachines · 2023Article
- A High-Sensitivity MEMS Accelerometer Using a ScMicromachines · 2023Article
- In Situ Synchrotron XRD Characterization of Piezoelectric AlMaterials (Basel, Switzerland) · 2023Article
Corrections and comments
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Authors and funding
6 authors.
Funding
Abstract
Accurate and efficient measurements of the piezoelectric properties of AlN and AlScN films are very important for the design and simulation of micro-electro-mechanical system (MEMS) sensors and actuator devices. In this study, a process control monitor (PCM) structure compatible with the device manufacturing process is designed to achieve accurate determination of the piezoelectric coefficients of MEMS devices. Double-beam laser interferometry (DBLI) and laser Doppler vibrometry (LDV) measurements are applied and combined with finite element method (FEM) simulations, and values of the piezoelectric parameters
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Registered trials
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