ArticleMaterials (Basel, Switzerland)2022
Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant.
Article in Materials (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
What it found
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Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
6 citing papers in PubMed.
- Hybridization of molecules via a common photonic mode.Proceedings of the National Academy of Sciences of the United States of America · 2025Article
- Controllable Preparation of Fused Silica Micro Lens Array through Femtosecond Laser Penetration-Induced Modification Assisted Wet Etching.Materials (Basel, Switzerland) · 2024Article
- A monolithic microfluidic probe for ambient mass spectrometry imaging of biological tissues.Lab on a chip · 2023Article
- Combined Femtosecond Laser Glass Microprocessing for Liver-on-Chip Device Fabrication.Materials (Basel, Switzerland) · 2023Article
- Sapphire Selective Laser Etching Dependence on Radiation Wavelength and Etchant.Micromachines · 2022Article
- Fabrication of Microfluidic Tesla Valve Employing Femtosecond Bursts.Micromachines · 2022Article
Corrections and comments
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Authors and funding
11 authors.
Funding
Abstract
Selective laser etching (SLE) is a technique that allows the fabrication of arbitrarily shaped glass micro-objects. In this work, we show how the capabilities of this technology can be improved in terms of selectivity and etch rate by applying an etchant solution based on a Potassium Hydroxide, water, and isopropanol mixture. By varying the concentrations of these constituents, the wetting properties, as well as the chemical reaction of fused silica etching, can be changed, allowing us to achieve etching rates in modified fused silica up to 820 μm/h and selectivity up to ∼3000. This is used to produce a high aspect ratio (up to 1:1000), straight and spiral microfluidic channels which are embedded inside a volume of glass. Complex 3D glass micro-structures are also demonstrated.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.