ArticleScientific reports2022
ITO film stack engineering for low-loss silicon optical modulators.
Article in Scientific reports, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 9 papers.
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Who cites it
9 citing papers in PubMed.
- High-Endurance, Low-Loss SbACS photonics · 2026Article
- High-Efficiency Fiber Edge Coupling for Silicon Nitride Integrated Photonics.Micromachines · 2025Article
- The Critical Role of Substrates in Mitigating the Power-Efficiency Trade-Off in Near-Field Thermophotovoltaics.ACS applied materials & interfaces · 2025Article
- Memristive Behavior in Carrier Accumulation-Based Optical Modulators.Nano letters · 2025Article
- All-Fiber Micro-Ring Resonator Based p-Si/n-ITO Heterojunction Electro-Optic Modulator.Materials (Basel, Switzerland) · 2025Article
- Realizing high-performance four active plasmonic filters using a single structure.Scientific reports · 2024Article
- Optical Bio-Inspired Synaptic Devices.Nanomaterials (Basel, Switzerland) · 2024Review
- Physics to system-level modeling of silicon-organic-hybrid nanophotonic devices.Scientific reports · 2024Article
- Thermo-optic epsilon-near-zero effects.Nature communications · 2024Article
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Authors and funding
11 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
The Indium Tin Oxide (ITO) platform is one of the promising solutions for state-of-the-art integrated optical modulators towards low-loss silicon photonics applications. One of the key challenges on this way is to optimize ITO-based thin films stacks for electro-optic modulators with both high extinction ratio and low insertion loss. In this paper we demonstrate the e-beam evaporation technology of 20 nm-thick ITO films with low extinction coefficient of 0.14 (N
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Registered trials
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