ReviewMicromachines2022
Review of Electrothermal Micromirrors.
Review in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
7 citing papers in PubMed.
- LiDAR Technology for UAV Detection: From Fundamentals and Operational Principles to Advanced Detection and Classification Techniques.Sensors (Basel, Switzerland) · 2025Review
- Capacitance-Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays.Micromachines · 2025Article
- Tunable MEMS-based meta-absorbers for nondispersive infrared gas sensing applications.Microsystems & nanoengineering · 2025Article
- MEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects.Micromachines · 2024Review
- MEMS-based meta-emitter with actively tunable radiation power characteristic.Discover nano · 2024Article
- Micromirror Array with Adjustable Reflection Characteristics Based on Different Microstructures and Its Application.Micromachines · 2024Article
- Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications.Micromachines · 2022Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
5 authors.
Funding
Abstract
Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced.
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.