Evidence map›Paper›PMID 35324209›Full record

ArticleNano letters2022

Deep-Learning-Assisted Focused Ion Beam Nanofabrication.

Oleksandr Buchnev, James A Grant-Jacob, Robert W Eason, Nikolay I Zheludev, Ben Mills, Kevin F MacDonald

Open access · hybridAbstract read
In one paragraph

Article in Nano letters, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.

0numbers the graph read from it
0cells of the map it votes in
7citing papers in PubMed
2.9field-weighted citation impact, top 9% of its field
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

7 citing papers in PubMed, 33 citations in OpenAlex.

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4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors at 2 institutions in 2 countries.

Oleksandr BuchnevOptoelectronics Research Centre, University of Southampton, Highfield, Southampton SO17 1BJ, United Kingdom.ORCID 0000-0001-6161-2797
James A Grant-JacobOptoelectronics Research Centre, University of Southampton, Highfield, Southampton SO17 1BJ, United Kingdom.
Robert W EasonOptoelectronics Research Centre, University of Southampton, Highfield, Southampton SO17 1BJ, United Kingdom.
Nikolay I ZheludevOptoelectronics Research Centre, University of Southampton, Highfield, Southampton SO17 1BJ, United Kingdom.
Ben MillsOptoelectronics Research Centre, University of Southampton, Highfield, Southampton SO17 1BJ, United Kingdom.ORCID 0000-0002-1784-1012
Kevin F MacDonaldOptoelectronics Research Centre, University of Southampton, Highfield, Southampton SO17 1BJ, United Kingdom.ORCID 0000-0002-3877-2976
University of Southampton · GBNanyang Technological University · SG

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Focused ion beam (FIB) milling is an important rapid prototyping tool for micro- and nanofabrication and device and materials characterization. It allows for the manufacturing of arbitrary structures in a wide variety of materials, but establishing the process parameters for a given task is a multidimensional optimization challenge, usually addressed through time-consuming, iterative trial-and-error. Here, we show that deep learning from prior experience of manufacturing can predict the postfabrication appearance of structures manufactured by focused ion beam (FIB) milling with >96% accuracy over a range of ion beam parameters, taking account of instrument- and target-specific artifacts. With predictions taking only a few milliseconds, the methodology may be deployed in near real time to expedite optimization and improve reproducibility in FIB processing.

Indexed as

Deep LearningReproducibility of Resultsdeep learningfocused ion beam millingnanofabrication

Identifiers

PMID35324209
PMCPMC9097578
OpenAlexW4220789082

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.