Influence of Deposition Modes and Thermal Annealing on Residual Stresses in Magnetron-Sputtered YSZ Membranes.

Thin-film electrolyte made of 8-mol% yttria stabilized zirconia (8YSZ) for solid oxide fuel cells (SOFCs) was fabricated on anode substrates using reactive magnetron sputtering of Zr-Y targets in a mixture of Ar and O2 gases. The deposition of 4−6 µm thin-film electrolyte was in the transition or oxide modes differing by the oxygen concentration in the sputtering atmosphere. The half-cell bending of the anode-supported SOFCs was measured to determine the residual stresses in the electrolyte films after the deposition and thermal annealing in air. The dependences were studied between the deposition modes, residual stresses in the films, and the SOFC performance. At 800 °C, the maximum power density of SOFCs ranged between 0.58 and 1.2 W/cm2 depending on the electrolyte deposition mode. Scanning electron microscopy was carried out to investigate the surface morphology and structure of the YSZ electrolyte films after thermal annealing. Additionally, an X-ray diffraction analysis of the YSZ electrolyte films was conducted for the synchrotron radiation beam during thermal annealing at different temperatures up to 1300 °C. It was found that certain deposition modes provide the formation of the YSZ electrolyte films with acceptable residual stresses (<1 GPa) at room temperature, including films deposited on large area anodes (100 × 100 mm2).