ArticleNature communications2022
λ/30 inorganic features achieved by multi-photon 3D lithography.
Article in Nature communications, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 16 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
16 citing papers in PubMed, 89 citations in OpenAlex.
- Recent Advances in Two-Photon Lithography of 3D Inorganic Microstructures: Glass, Ceramics, Metals, and Carbon.Small (Weinheim an der Bergstrasse, Germany) · 2026Review
- Multiphoton Absorption in Branched Quadrupolar Diquinoxalines for Two-Photon Polymerization Design.ACS physical chemistry Au · 2026Article
- High-performance topochemical polymerization-based photo-carving with sub-50 nm resolution utilizing visible light.Nature communications · 2026Article
- Hybrid Multiphoton Lithography Scaffolds for Nanoscale Mechanobiological Assessment in Microscale Bone Models.Small (Weinheim an der Bergstrasse, Germany) · 2026Article
- Universal High-Resolution Copper Patterning on Diverse Substrates via Sequential Laser-Induced Transfer and Electroless Plating.Micromachines · 2026Article
- A universal all-dry microfabrication method for sensitive electronic materials via an inorganic molecular lithographic mediator.Nature communications · 2026Article
- Direct measurement of two-photon absorption and refraction properties of SZ2080Nanophotonics (Berlin, Germany) · 2025Article
- Two-photon absorption under few-photon irradiation for optical nanoprinting.Nature communications · 2025Article
- 3D Printing of Hierarchical Structures Made of Inorganic Silicon-Rich Glass Featuring Self-Forming Nanogratings.ACS nano · 2024Article
- Three-Dimensional Optothermal Manipulation of Light-Absorbing Particles in Phase-Change Gel Media.ACS nano · 2024Article
- Progress in Polyhedral Oligomeric Silsesquioxane (POSS) Photoresists: A Comprehensive Review across Lithographic Systems.Polymers · 2024Review
- Fraxicon for Optical Applications with Aperture ∼1 mm: Characterisation Study.Nanomaterials (Basel, Switzerland) · 2024Article
- 3D Printing Hierarchically Nano-Ordered Structures.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2023Article
- Three-dimensional printing of silica glass with sub-micrometer resolution.Nature communications · 2023Article
- Synthesis of biocompatible BSA-GMA and two-photon polymerization of 3D hydrogels with free radical type I photoinitiator.International journal of bioprinting · 2023Article
- Optimization mechanism and applications of ultrafast laser machining towards highly designable 3D micro/nano structuring.RSC advances · 2022Review
Corrections and comments
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Authors and funding
6 authors at 3 institutions in 1 country.
Funding
Abstract
It's critically important to construct arbitrary inorganic features with high resolution. As an inorganic photoresist, hydrogen silsesquioxane (HSQ) has been patterned by irradiation sources with short wavelength, such as EUV and electron beam. However, the fabrication of three- dimensional nanoscale HSQ features utilizing infrared light sources is still challenging. Here, we demonstrate femtosecond laser direct writing (FsLDW) of HSQ through multi-photon absorption process. 26 nm feature size is achieved by using 780 nm fs laser, indicating super-diffraction limit photolithography of λ/30 for HSQ. HSQ microstructures by FsLDW possess nanoscale resolution, smooth surface, and thermal stability up to 600 °C. Furthermore, we perform FsLDW of HSQ to construct structural colour and Fresnel lens with desirable optical properties, thermal and chemical resistance. This study demonstrates that inorganic features can be flexibly achieved by FsLDW of HSQ, which would be prospective for fabricating micro-nano devices requiring nanoscale resolution, thermal and chemical resistance.
Identifiers
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.