ArticleSensors (Basel, Switzerland)2022
A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference.
Article in Sensors (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
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Who cites it
6 citing papers in PubMed.
- Fiber-Optic Pressure Sensors: Recent Advances in Sensing Mechanisms, Fabrication Technologies, and Multidisciplinary Applications.Sensors (Basel, Switzerland) · 2025Review
- Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption.Microsystems & nanoengineering · 2024Article
- Dynamic Focusing (DF) Cone-Based Omnidirectional Fingertip Pressure Sensor with High Sensitivity in a Wide Pressure Range.Sensors (Basel, Switzerland) · 2023Article
- Design and Development of a MOEMS Accelerometer Using SOI Technology.Micromachines · 2023Article
- Detection of Volatile Organic Compounds by Using MEMS Sensors.Sensors (Basel, Switzerland) · 2022Article
- Studying the effect of polymethyl methacrylate polymer opticals fibers (POFs) on the performance of composite materials based on the polyether ether ketone (PEEK) polymer matrix.Emergent materials · 2022Article
Corrections and comments
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Authors and funding
6 authors.
Funding
Abstract
Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bulky. In this paper, a compact optical Fabry-Pérot (FP) pressure sensor for wind pressure measurement was developed by MEMS technology. The pressure sensor consists of a MEMS sensing chip, a vertical-cavity surface-emitting laser (Vcsel), and a photodiode (PD). The sensing chip is combined with an FP cavity and a pressure sensing diaphragm which adopts the square film and is fabricated by Silicon on Insulator (SOI) wafer. To calibrate the pressure sensor, the experimental platform which consists of a digital pressure gauge, a pressure loading machine, a digital multimeter, and a laser driver was set up. The experimental results show that the sensitivity of the diaphragm is 117.5 nm/kPa. The measurement range and sensitivity of the pressure sensor are 0-700 Pa and 115 nA/kPa, respectively. The nonlinearity, repeatability, and hysteresis of the pressure sensor are 1.48%FS, 2.23%FS, and 1.59%FS, respectively, which lead to the pressure accuracy of 3.12%FS.
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Registered trials
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