ArticleSensors (Basel, Switzerland)2022
Silicone Rubber Fabry-Perot Pressure Sensor Based on a Spherical Optical Fiber End Face.
Article in Sensors (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
To improve the fringe contrast and the sensitivity of Fabry-Perot (FP) pressure sensors, a silicone rubber FP pressure sensor based on a spherical optical fiber end face is proposed. The ratio of silicone rubber ingredients and the diameter and thickness of silicone rubber diaphragm were optimized by a simulation based on experimental tests that analyzed elastic parameters, and the influence of the radius of a spherical optical fiber and the initial cavity length of the sensor on the fringe contrast was investigated and optimized. Pressure sensor samples were fabricated for pressure test and temperature cross-influence test. Gas pressure experimental results within a pressure range of 0~40 kPa show the average sensitivity of the sensor is -154.56 nm/kPa and repeatability error is less than 0.71%. Long-term pressure experimental results show it has good repeatability and stability. Temperature experimental results show its temperature cross-sensitivity is 0.143 kPa/°C. The good performance of the proposed FP pressure sensor will expand its applications in biochemical applications, especially in human body pressure monitoring.
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