ArticleScientific reports2022
Exploitation of response surface method for the optimization of RF-MEMS reconfigurable devices in view of future beyond-5G, 6G and super-IoT applications.
Article in Scientific reports, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 10 papers.
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Who cites it
10 citing papers in PubMed.
- Robust structural superlubric interfaces under high current density, from understandings to applications.Microsystems & nanoengineering · 2026Article
- A multi-functional MEMS resonator for simultaneously dual-mode physical sensing and ppb-level timing.Microsystems & nanoengineering · 2025Article
- Large Built-in Fields and Tunable Ferroelectricity in Composition-Graded ScAlN Thin Films Deposited by Reactive Sputtering.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Progress in RF-MEMS.Micromachines · 2025Article
- An Assessment of Local Geometric Uncertainties in Polysilicon MEMS: A Genetic Algorithm and POD-Kriging Surrogate Modeling Approach.Micromachines · 2025Article
- Comprehensive Review of RF MEMS Switches in Satellite Communications.Sensors (Basel, Switzerland) · 2024Review
- MEMS-Switched Triangular and U-Shaped Band-Stop Resonators for K-Band Operation.Sensors (Basel, Switzerland) · 2023Article
- In-vehicle wireless driver breath alcohol detection system using a microheater integrated gas sensor based on Sn-doped CuO nanostructures.Scientific reports · 2023Article
- Machine Learning-Based Modeling and Generic Design Optimization Methodology for Radio-Frequency Microelectromechanical Devices.Sensors (Basel, Switzerland) · 2023Article
- Enhanced Robustness of a Bridge-Type Rf-Mems Switch for Enabling Applications in 5G and 6G Communications.Sensors (Basel, Switzerland) · 2022Article
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Authors and funding
3 authors.
Funding
Abstract
The emerging paradigms of the Beyond-5G, 6G and Super-IoT will demand for high-performance Radio Frequency (RF) passive components, and RF-MEMS technology, i.e. Microsystems-based RF passives, is a good candidate to meet such a challenge. As known, RF-MEMS have a complex behavior, that crosses different physical domains (mechanical; electrical; electromagnetic), making the whole design optimization and trimming phases particularly articulated and time consuming. In this work, we propose a novel design optimization approach based on the Response Surface Method (RSM) statistical methodology, focusing on a class of RF-MEMS-based programmable step power attenuators. The proposed method is validated both against physical simulations, performed with Finite Element Method (FEM) commercial software tools, as well as experimental measurements of physical devices. The case study here discussed features 3 DoFs (Degrees of Freedom), comprising both geometrical and material parameters, and aims to optimize the RF performances of the MEMS attenuator in terms of attenuation (S21 Scattering parameter) and reflection (VSWR-Voltage Standing Wave Ratio). When validated, the proposed RSM-based method allows avoiding physical FEM simulations, thus making the design optimization considerably faster and less complex, both in terms of time and computational load.
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