Evidence map›Paper›PMID 35214998›Full record

ArticleNanomaterials (Basel, Switzerland)2022

The Influence of Argon Cluster Ion Bombardment on the Characteristics of AlN Films on Glass-Ceramics and Si Substrates.

Ivan V Nikolaev, Pavel V Geydt, Nikolay G Korobeishchikov, Aleksandr V Kapishnikov, Vladimir A Volodin, Ivan A Azarov, Vladimir I Strunin, Evgeny Y Gerasimov

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Nanomaterials (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

Ivan V NikolaevLaboratory of Functional Diagnostics of Low-Dimensional Structures for Nanoelectronics, Novosibirsk State University, 630090 Novosibirsk, Russia.ORCID 0000-0001-8704-1689
Pavel V GeydtLaboratory of Functional Diagnostics of Low-Dimensional Structures for Nanoelectronics, Novosibirsk State University, 630090 Novosibirsk, Russia.ORCID 0000-0003-3266-826X
Nikolay G KorobeishchikovDepartment of Applied Physics, Novosibirsk State University, 630090 Novosibirsk, Russia.ORCID 0000-0003-1047-4894
Aleksandr V KapishnikovLaboratory of Functional Diagnostics of Low-Dimensional Structures for Nanoelectronics, Novosibirsk State University, 630090 Novosibirsk, Russia.ORCID 0000-0002-3921-5629
Vladimir A VolodinLaboratory of Functional Diagnostics of Low-Dimensional Structures for Nanoelectronics, Novosibirsk State University, 630090 Novosibirsk, Russia.ORCID 0000-0002-1431-8242
Ivan A AzarovLaboratory of Functional Diagnostics of Low-Dimensional Structures for Nanoelectronics, Novosibirsk State University, 630090 Novosibirsk, Russia.ORCID 0000-0001-9571-2227
Vladimir I StruninDepartment of Experimental Physics and Radiophysics, Dostoevsky Omsk State University, 644077 Omsk, Russia.ORCID 0000-0002-9649-9461
Evgeny Y GerasimovBoreskov Institute of Catalysis, Russian Academy of Sciences (Siberian Branch), 630090 Novosibirsk, Russia.ORCID 0000-0002-3230-3335

Funding

Russian Foundation for Basic Research 21-19-00046The Ministry of Education and Science of the Russian Federation FSUS-2020-0029The Ministry of Education and Science of the Russian Federation FSUS-2020-0039
6 · The paper itself

Abstract

In this paper, the influence of surface modification on the characteristics and properties of AlN thin films on Si and glass-ceramics substrates is investigated. The surface modification was made at various parameters of argon cluster ions. By using XRD and Raman spectroscopy, it was shown that the obtained AlN films have a hexagonal structure with a characteristic direction of texturing along the

Indexed as

aluminum nitridegas cluster ion beammaterial characterizationsurface smoothingthin films

Identifiers

PMID35214998
PMCPMC8878031

What OpenQuestion holds

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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.