ReviewMicromachines2022
Scanning Probe Lithography: State-of-the-Art and Future Perspectives.
Review in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 18 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
18 citing papers in PubMed.
- Desktop Fabrication of Plasmonic Nanoantennas with 10 nm Precision Using Field-Emission Scanning Probe Lithography.ACS omega · 2026Article
- Direct resist-free patterning of an organic semiconductor via thermal scanning probe lithography.Discover nano · 2026Article
- Study on the Wear Mechanism of a Diamond AFM Tip During Scribing of a Single-Crystal Silicon.Micromachines · 2026Article
- Modeling the Dynamics of Electric Field-Assisted Local Functionalization in Two-Dimensional Materials.Materials (Basel, Switzerland) · 2026Article
- Advancing nanolithography: a comprehensive review of materials for local anodic oxidation with AFM.Beilstein journal of nanotechnology · 2026Review
- Engineering multifunctional surface topography to regulate multiple biological responses.Biomaterials · 2025Review
- Advances and Applications of Oxidized van der Waals Transition Metal Dichalcogenides.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Review
- Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review.Micromachines · 2024Review
- Advancements in Polymer Biomaterials as Scaffolds for Corneal Endothelium Tissue Engineering.Polymers · 2024Review
- Anisotropic Effects in Local Anodic Oxidation Nanolithography on Silicon Surfaces: Insights from ReaxFF Molecular Dynamics.Langmuir : the ACS journal of surfaces and colloids · 2024Article
- Advances in lithographic techniques for precision nanostructure fabrication in biomedical applications.Discover nano · 2023Review
- Thermal Scanning-Probe Lithography for Broad-Band On-Demand Plasmonic Nanostructures on Transparent Substrates.ACS applied nano materials · 2023Article
- Spatial modulation of scalable nanostructures by combining maskless plasmonic lithography and grayscale-patterned strategy.Nanoscale advances · 2023Article
- Measurement and Control System for Atomic Force Microscope Based on Quartz Tuning Fork Self-Induction Probe.Micromachines · 2023Article
- Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning.Microsystems & nanoengineering · 2023Article
- Review
- Editorial for the Special Issue on Ultra Precision Technologies for Micromachining, Volume II.Micromachines · 2022Article
- The Dislocation- and Cracking-Mediated Deformation of Single Asperity GaAs during Plowing Using Molecular Dynamics Simulation.Micromachines · 2022Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
8 authors.
Funding
Abstract
High-throughput and high-accuracy nanofabrication methods are required for the ever-increasing demand for nanoelectronics, high-density data storage devices, nanophotonics, quantum computing, molecular circuitry, and scaffolds in bioengineering used for cell proliferation applications. The scanning probe lithography (SPL) nanofabrication technique is a critical nanofabrication method with great potential to evolve into a disruptive atomic-scale fabrication technology to meet these demands. Through this timely review, we aspire to provide an overview of the SPL fabrication mechanism and the state-the-art research in this area, and detail the applications and characteristics of this technique, including the effects of thermal aspects and chemical aspects, and the influence of electric and magnetic fields in governing the mechanics of the functionalized tip interacting with the substrate during SPL. Alongside this, the review also sheds light on comparing various fabrication capabilities, throughput, and attainable resolution. Finally, the paper alludes to the fact that a majority of the reported literature suggests that SPL has yet to achieve its full commercial potential and is currently largely a laboratory-based nanofabrication technique used for prototyping of nanostructures and nanodevices.
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.