ArticleMicromachines2022
Design and Optimization of a BAW Magnetic Sensor Based on Magnetoelectric Coupling.
Article in Micromachines, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
3 citing papers in PubMed.
- Modeling of Magnetoelectric Microresonator Using Numerical Method and Simulated Annealing Algorithm.Micromachines · 2023Article
- Trends and Applications of Surface and Bulk Acoustic Wave Devices: A Review.Micromachines · 2022Review
- A Low-Frequency MEMS Magnetoelectric Antenna Based on Mechanical Resonance.Micromachines · 2022Article
Corrections and comments
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Authors and funding
9 authors.
Funding
Abstract
Magnetic sensors actuated by bulk acoustic wave (BAW) have attracted extensive attention due to the fact of their high sensitivity, GHz-level high frequency, and small size. Different from previous studies, suppression of energy loss and improvement in energy conversion efficiency of the BAW magnetoelectric (ME) sensor were systematically considered during the device design in this work. Finite element analysis models of material (magnetic composite), structure (ME heterostructure), and device (BAW ME magnetic sensor) were established and analyzed in COMSOL software. Additionally, the magnetic composite was prepared by radio frequency magnetron sputtering, and its soft magnetism was characterized by magnetic hysteresis loop and surface roughness. The research results demonstrate that after inserting four layers of 5 nm Al
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