Evidence map›Paper›PMID 35197457›Full record

ReviewLight, science & applications2022

Deep learning in optical metrology: a review.

Chao Zuo, Jiaming Qian, Shijie Feng, Wei Yin, Yixuan Li, Pengfei Fan, Jing Han, Kemao Qian, Qian Chen

Erratum issuedAbstract readReview
In one paragraph

Review in Light, science & applications, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. An erratum has been issued. Cited by 85 papers.

0numbers the graph read from it
0cells of the map it votes in
85citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

85 citing papers in PubMed.

  1. Article
  2. Review
  3. Article
  4. Wavefront Line-Scan Imaging Via a Single-Pixel Detector.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026
    Article
  5. Article
  6. Article
  7. Article
  8. Article
  9. Article
  10. Article
  11. Review
  12. Article
  13. Article
  14. Article
  15. Article
  16. Article
  17. Article
  18. Review
  19. Article
  20. Multi-Task Deep Learning for Surface Metrology.Sensors (Basel, Switzerland) · 2025
    Article

25 more citing papers are in PubMed but not listed here.

4 · The record

Corrections and comments

5 · Who and what money

Authors and funding

9 authors.

Chao Zuo *Smart Computational Imaging (SCI) Laboratory, Nanjing University of Science and Technology, 210094, Nanjing, Jiangsu Province, China. zuochao@njust.edu.cn.ORCID http://orcid.org/0000-0002-1461-0032
Jiaming Qian *Smart Computational Imaging (SCI) Laboratory, Nanjing University of Science and Technology, 210094, Nanjing, Jiangsu Province, China.ORCID http://orcid.org/0000-0002-9110-4950
Shijie FengSmart Computational Imaging (SCI) Laboratory, Nanjing University of Science and Technology, 210094, Nanjing, Jiangsu Province, China.
Wei YinSmart Computational Imaging (SCI) Laboratory, Nanjing University of Science and Technology, 210094, Nanjing, Jiangsu Province, China.ORCID http://orcid.org/0000-0002-9148-3401
Yixuan LiSmart Computational Imaging (SCI) Laboratory, Nanjing University of Science and Technology, 210094, Nanjing, Jiangsu Province, China.
Pengfei FanSmart Computational Imaging (SCI) Laboratory, Nanjing University of Science and Technology, 210094, Nanjing, Jiangsu Province, China.
Jing HanJiangsu Key Laboratory of Spectral Imaging & Intelligent Sense, Nanjing University of Science and Technology, 210094, Nanjing, Jiangsu Province, China.
Kemao QianSchool of Computer Science and Engineering, Nanyang Technological University, Singapore, 639798, Singapore. mkmqian@ntu.edu.sg.
Qian ChenJiangsu Key Laboratory of Spectral Imaging & Intelligent Sense, Nanjing University of Science and Technology, 210094, Nanjing, Jiangsu Province, China. chenqian@njust.edu.cn.

Funding

National Natural Science Foundation of China (National Science Foundation of China) 61722506, 61705105, 62075096
6 · The paper itself

Abstract

With the advances in scientific foundations and technological implementations, optical metrology has become versatile problem-solving backbones in manufacturing, fundamental research, and engineering applications, such as quality control, nondestructive testing, experimental mechanics, and biomedicine. In recent years, deep learning, a subfield of machine learning, is emerging as a powerful tool to address problems by learning from data, largely driven by the availability of massive datasets, enhanced computational power, fast data storage, and novel training algorithms for the deep neural network. It is currently promoting increased interests and gaining extensive attention for its utilization in the field of optical metrology. Unlike the traditional "physics-based" approach, deep-learning-enabled optical metrology is a kind of "data-driven" approach, which has already provided numerous alternative solutions to many challenging problems in this field with better performances. In this review, we present an overview of the current status and the latest progress of deep-learning technologies in the field of optical metrology. We first briefly introduce both traditional image-processing algorithms in optical metrology and the basic concepts of deep learning, followed by a comprehensive review of its applications in various optical metrology tasks, such as fringe denoising, phase retrieval, phase unwrapping, subset correlation, and error compensation. The open challenges faced by the current deep-learning approach in optical metrology are then discussed. Finally, the directions for future research are outlined.

Identifiers

PMID35197457
PMCPMC8866517

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.