ArticleMicrosystems & nanoengineering2022
Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor.
Article in Microsystems & nanoengineering, 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 14 papers.
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14 citing papers in PubMed, 50 citations in OpenAlex.
- Internal Resonance Mismatch-Controlled Dissipative Bistability Collapse in Coupled Micromechanical Oscillators.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Article
- High-velocity laser Doppler vibrometry measurements on an aluminum nitride bimorph wedge resonator.Communications engineering · 2026Article
- Dispersive coupling and dual-mode sensing of a micromechanical resonator.Microsystems & nanoengineering · 2026Article
- Tunable energy transfer in coupled nonlinear MEMS resonators under parametric modulation for enhanced sensor performance.Microsystems & nanoengineering · 2025Article
- On the Mode Localization Between Two Unidentical Resonators with Different Bending Modes for Acceleration Sensing.Sensors (Basel, Switzerland) · 2025Article
- Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators.Microsystems & nanoengineering · 2025Article
- Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators.Microsystems & nanoengineering · 2025Article
- Coherent energy transfer in coupled nonlinear microelectromechanical resonators.Nature communications · 2025Article
- A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity.Microsystems & nanoengineering · 2025Article
- A Mode-Localized Micro-Electromechanical System Accelerometer with Force Rebalance Closed-Loop Control.Micromachines · 2025Article
- MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge.Microsystems & nanoengineering · 2024Article
- Input-Output-Improved Reservoir Computing Based on Duffing Resonator Processing Dynamic Temperature Compensation for MEMS Resonant Accelerometer.Micromachines · 2023Article
- A decouple-decomposition noise analysis model for closed-loop mode-localized tilt sensors.Microsystems & nanoengineering · 2023Article
- Micromechanical mode-localized electric current sensor.Microsystems & nanoengineering · 2022Article
Corrections and comments
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Authors and funding
8 authors at 3 institutions in 2 countries.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Mode-localized sensors have attracted attention because of their high parametric sensitivity and first-order common-mode rejection to temperature drift. The high-fidelity detection of resonator amplitude is critical to determining the resolution of mode-localized sensors where the measured amplitude ratio in a system of coupled resonators represents the output metric. Operation at specific bifurcation points in a nonlinear regime can potentially improve the amplitude bias stability; however, the amplitude ratio scale factor to the input measurand in a nonlinear regime has not been fully investigated. This paper theoretically and experimentally elucidates the operation of mode-localized sensors with respect to stiffness perturbations (or an external acceleration field) in a nonlinear Duffing regime. The operation of a mode-localized accelerometer is optimized with the benefit of the insights gained from theoretical analysis with operation in the nonlinear regime close to the top critical bifurcation point. The phase portraits of the amplitudes of the two resonators under different drive forces are recorded to support the experimentally observed improvements for velocity random walk. Employing temperature control to suppress the phase and amplitude variations induced by the temperature drift, 1
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