ArticleIEEE sensors journal2021
Design and Experimental Assessment of Low-Noise Piezoelectric Microelectromechanical Systems Vibration Sensors.
Article in IEEE sensors journal, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
8 citing papers in PubMed.
- Design of multi-bandwidth piezoelectric microelectromechanical systems accelerometers for totally implantable auditory prostheses: How many bandwidths are enough?The Journal of the Acoustical Society of America · 2025Article
- Optimal Position and Orientation of an Ossicular Accelerometer for Human Auditory Prostheses.Sensors (Basel, Switzerland) · 2024Article
- The UmboMic: A PVDF Cantilever Microphone.Journal of micromechanics and microengineering : structures, devices, and systems · 2024Article
- Design and Analysis Method of Piezoelectric Liquid Driving Device with Elastic External Displacement.Micromachines · 2024Article
- Piezoelectric Multi-Channel Bilayer Transducer for Sensing and Filtering Ossicular Vibration.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- An Implantable Piezofilm Middle Ear Microphone: Performance in Human Cadaveric Temporal Bones.Journal of the Association for Research in Otolaryngology : JARO · 2024Article
- Design of Piezoelectric Dual-Bandwidth Accelerometers for Completely Implantable Auditory Prostheses.IEEE sensors journal · 2023Article
- A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach.Microsystems & nanoengineering · 2023Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
4 authors.
Funding
Abstract
The ubiquity of vibration sensors and accelerometers, as well as advances in microfabrication technologies, have led to the development of implantable devices for biomedical applications. This work describes a piezoelectric microelectromechanical systems accelerometer designed for potential use in auditory prostheses. The design includes an aluminum nitride bimorph beam with a silicon proof mass. Analytic models of the device sensitivity and noise are presented. These lead to a minimum detectable acceleration cost function for the sensor that can be used to optimize sensor designs more effectively than typical sensitivity maximizing or electrical noise minimizing approaches. A fabricated device with a 1 μm thick, 100 μm long, and 700 μm wide beam and a 400 μm thick, 63 μm long, and 740 μm wide proof mass is tested experimentally. Results indicate accurate modeling of the system sensitivity up to the first resonant frequency (1420 Hz). The low-frequency sensitivity of the device is 1.3 mV/g, and the input referred noise is 36.3
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.