Evidence map›Paper›PMID 35062612›Full record

ArticleSensors (Basel, Switzerland)2022

Developing GLAD Parameters to Control the Deposition of Nanostructured Thin Film.

Jakub Bronicki, Dominik Grochala, Artur Rydosz

Abstract read
In one paragraph

Article in Sensors (Basel, Switzerland), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Review
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

3 authors.

Jakub BronickiBiomarkers Analysis LAB, Institute of Electronics, AGH University of Science and Technology, al. A. Mickiewicza 30, 30-059 Krakow, Poland.ORCID 0000-0001-9635-7589
Dominik GrochalaBiomarkers Analysis LAB, Institute of Electronics, AGH University of Science and Technology, al. A. Mickiewicza 30, 30-059 Krakow, Poland.ORCID 0000-0001-9970-710X
Artur RydoszBiomarkers Analysis LAB, Institute of Electronics, AGH University of Science and Technology, al. A. Mickiewicza 30, 30-059 Krakow, Poland.ORCID 0000-0002-9148-1094

Funding

National Centre for Research and Development Rzeczy są dla ludzi/0089/2020
6 · The paper itself

Abstract

In this paper, we describe the device developed to control the deposition parameters to manage the glancing angle deposition (GLAD) process of metal-oxide thin films for gas-sensing applications. The GLAD technique is based on a set of parameters such as the tilt, rotation, and substrate temperature. All parameters are crucial to control the deposition of nanostructured thin films. Therefore, the developed GLAD controller enables the control of all parameters by the scientist during the deposition. Additionally, commercially available vacuum components were used, including a three-axis manipulator. High-precision readings were tested, where the relative errors calculated using the parameters provided by the manufacturer were 1.5% and 1.9% for left and right directions, respectively. However, thanks to the formula developed by our team, the values were decreased to 0.8% and 0.69%, respectively.

Indexed as

gas sensorsglancing angle depositionmagnetron sputteringmetal oxidesthin films

Identifiers

PMID35062612
PMCPMC8779826

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.