Novel Fabrication Technology for Clamped Micron-Thick Titanium Diaphragms Used for the Packaging of an Implantable MEMS Acoustic Transducer.

Lukas Prochazka, Alexander Huber, Michael Schneider, Naureen Ghafoor, Jens Birch, Flurin Pfiffner

Open access · goldAbstract read

In one paragraph

Article in Micromachines, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it

0cells of the map it votes in

1citing papers in PubMed

0.3field-weighted citation impact, top 49% of its field

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed, 5 citations in OpenAlex.

Editorial for the Special Issue on Micromachined Acoustic Transducers for Audio-Frequency Range.Micromachines · 2025
Article

4 · The record

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PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors at 2 institutions in 2 countries.

Lukas ProchazkaDepartment of Otorhinolaryngology, Head & Neck Surgery, University Hospital Zurich, University of Zurich, 8091 Zurich, Switzerland.

Alexander HuberDepartment of Otorhinolaryngology, Head & Neck Surgery, University Hospital Zurich, University of Zurich, 8091 Zurich, Switzerland.

Michael SchneiderSwissNeutronics AG, 5313 Klingnau, Switzerland.

Naureen GhafoorDepartment of Physics, Chemistry and Biology (IFM), Linköping University, 581 83 Linköping, Sweden.

Jens BirchDepartment of Physics, Chemistry and Biology (IFM), Linköping University, 581 83 Linköping, Sweden.

Flurin PfiffnerDepartment of Otorhinolaryngology, Head & Neck Surgery, University Hospital Zurich, University of Zurich, 8091 Zurich, Switzerland.ORCID 0000-0003-3937-1266

University of Zurich · CHLinköping University · SE

Funding

Cochlear AG, European Headquarters, Switzerland xxCochlear Technology Centre Belgium, Mechelen, Belgium xxThe European Union's Horizon 2020 program under the Eurostars E12584-TiSR

6 · The paper itself

Abstract

Micro-Electro-Mechanical Systems (MEMS) acoustic transducers are highly sophisticated devices with high sensing performance, small size, and low power consumption. To be applied in an implantable medical device, they require a customized packaging solution with a protecting shell, usually made from titanium (Ti), to fulfill biocompatibility and hermeticity requirements. To allow acoustic sound to be transferred between the surroundings and the hermetically sealed MEMS transducer, a compliant diaphragm element needs to be integrated into the protecting enclosure. In this paper, we present a novel fabrication technology for clamped micron-thick Ti diaphragms that can be applied on arbitrary 3D substrate geometry and hence directly integrated into the packaging structure. Stiffness measurements on various diaphragm samples illustrate that the technology enables a significant reduction of residual stress in the diaphragm developed during its deposition on a polymer sacrificial material.

Indexed as

DC magnetron sputteringimplantable acoustic transducerintrinsic stresspackagingpolymer sacrificial materialstress measurementstress relieftitanium/platinum multi-layer diaphragm

Identifiers

PMID35056242

DOI10.3390/mi13010074

PMCPMC8779576

OpenAlexW4205472443

What OpenQuestion holds

Textmetadata

LicenceCC BY

Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.