ReviewMicromachines2021
AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications.
Corina Bîrleanu et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
2 papers cite it
this papercites it
ReviewMicromachines2021
Corina Bîrleanu et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.