ArticleMicromachines2021
Opto-Microfluidic Fabry-Perot Sensor with Extended Air Cavity and Enhanced Pressure Sensitivity.
Article in Micromachines, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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Who cites it
3 citing papers in PubMed.
- Methodology for Static Pressure Measurement Under Confined Spatial Conditions in the Low-Pressure Range.Sensors (Basel, Switzerland) · 2026Article
- Liquid Pressure Sensor Based on Fiber Bragg Grating with an Adjustable Structure.Sensors (Basel, Switzerland) · 2022Article
- A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference.Sensors (Basel, Switzerland) · 2022Article
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Authors and funding
7 authors.
Funding
Abstract
An opto-microfluidic static pressure sensor based on a fiber Fabry-Perot Interferometer (FPI) with extended air cavity for enhancing the measuring sensitivity is proposed. The FPI is constructed in a microfluidic channel by the combination of the fixed fiber-end reflection and floating liquid surface reflection faces. A change of the aquatic pressure will cause a drift of the liquid surface and the pressure can be measured by detecting the shift of the FPI spectrum. Sensitivity of the sensor structure can be enhanced significantly by extending the air region of the FPI. The structure is manufactured by using a common single-mode optical fiber, and a silica capillary with the inner wall coated with a hydrophobic film. A sample with 3500 μm air cavity length has demonstrated the pressure sensitivity of about 32.4 μm/kPa, and the temperature cross-sensitivity of about 0.33 kPa/K.
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