Evidence map›Paper›PMID 34960260›Full record

ArticleSensors (Basel, Switzerland)2021

Thin-Film-Based SAW Magnetic Field Sensors.

Jana Marie Meyer, Viktor Schell, Jingxiang Su, Simon Fichtner, Erdem Yarar, Florian Niekiel, Thorsten Giese, Anne Kittmann, Lars Thormählen, Vadim Lebedev and 4 more

Abstract read
In one paragraph

Article in Sensors (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 9 papers.

0numbers the graph read from it
0cells of the map it votes in
9citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

9 citing papers in PubMed.

  1. Article
  2. Article
  3. Review
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  5. Review
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4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

14 authors.

Jana Marie MeyerFraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany.
Viktor SchellInstitute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany.ORCID 0000-0003-4226-5827
Jingxiang SuFraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany.ORCID 0000-0002-2994-2021
Simon FichtnerFraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany.
Erdem YararFraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany.
Florian NiekielFraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany.
Thorsten GieseFraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany.
Anne KittmannInstitute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany.ORCID 0000-0002-6759-4208
Lars ThormählenInstitute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany.
Vadim LebedevFraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, 79108 Freiburg, Germany.
Stefan MoenchFraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, 79108 Freiburg, Germany.ORCID 0000-0002-5095-8781
Agnė ŽukauskaitėFraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, 79108 Freiburg, Germany.ORCID 0000-0002-8125-3805
Eckhard QuandtInstitute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany.
Fabian LofinkFraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany.

Funding

Deutsche Forschungsgemeinschaft CRC 1261 Project A9, 286471992Federal Ministry of Education and Research 16FMD01K, 16FMD02, 16FMD03
6 · The paper itself

Abstract

In this work, the first surface acoustic-wave-based magnetic field sensor using thin-film AlScN as piezoelectric material deposited on a silicon substrate is presented. The fabrication is based on standard semiconductor technology. The acoustically active area consists of an AlScN layer that can be excited with interdigital transducers, a smoothing SiO

Indexed as

AlScNcurrent sensorFeCoSiBmagnetic field sensormagnetostrictionMEMSsurface acoustic wavessurface acoustic wave sensorthin film

Identifiers

PMID34960260
PMCPMC8703322

What OpenQuestion holds

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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.