ArticleMicrosystems & nanoengineering2021
Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications.
Article in Microsystems & nanoengineering, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
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Who cites it
7 citing papers in PubMed.
- Acoustofluidic Diversity Achieved by Multiple Modes of Acoustic Waves Generated on Piezoelectric-Film-Coated Aluminum Sheets.ACS applied materials & interfaces · 2024Article
- Recent Progress in Flexible Surface Acoustic Wave Sensing Technologies.Micromachines · 2024Review
- Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence.Microsystems & nanoengineering · 2024Article
- Low-noise fluorescent detection of cardiac troponin I in human serum based on surface acoustic wave separation.Microsystems & nanoengineering · 2023Article
- Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections.Micromachines · 2022Article
- Self-Powered Long-Life Microsystem for Vibration Sensing and Target Recognition.Sensors (Basel, Switzerland) · 2022Article
- A new strategy to minimize humidity influences on acoustic wave ultraviolet sensors using ZnO nanowires wrapped with hydrophobic silica nanoparticles.Microsystems & nanoengineering · 2022Article
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Authors and funding
10 authors.
Funding
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Abstract
Flexible surface acoustic wave (SAW) devices have recently attracted tremendous attention for their widespread application in sensing and microfluidics. However, for these applications, SAW devices often need to be bent into off-axis deformations between the acoustic wave propagation direction and bending direction. Currently, there are few studies on this topic, and the bending mechanisms during off-axis bending deformations have remained unexplored for multisensing applications. Herein, we fabricated aluminum nitride (AlN) flexible SAW devices by using high-quality AlN films deposited on flexible glass substrates and systematically investigated their complex deformation behaviors. A theoretical model was first developed using coupling wave equations and the boundary condition method to analyze the characteristics of the device with bending and off-axis deformation under elastic strains. The relationships between the frequency shifts of the SAW device and the bending strain and off-axis angle were obtained, and the results were identical to those from the theoretical calculations. Finally, we performed proof-of-concept demonstrations of its multisensing potential by monitoring human wrist movements at various off-axis angles and detecting UV light intensities on a curved surface, thus paving the way for the application of versatile flexible electronics.
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