Evidence map›Paper›PMID 34888758›Full record

ArticleNano-micro letters2021

Fabrication of High-Density Out-of-Plane Microneedle Arrays with Various Heights and Diverse Cross-Sectional Shapes.

Hyeonhee Roh, Young Jun Yoon, Jin Soo Park, Dong-Hyun Kang, Seung Min Kwak, Byung Chul Lee, Maesoon Im

Open access · diamondAbstract read
In one paragraph

Article in Nano-micro letters, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 23 papers.

0numbers the graph read from it
0cells of the map it votes in
23citing papers in PubMed
4.1field-weighted citation impact, top 5% of its field
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

23 citing papers in PubMed, 73 citations in OpenAlex.

  1. Review
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  10. In vivo microelectrode arrays for neuroscience.Nature reviews. Methods primers · 2025
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  13. Review
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  18. Glycyrrhizic acid modifiedFrontiers in chemistry · 2023
    Article
  19. Review
  20. Review
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors at 3 institutions in 2 countries.

Hyeonhee Roh *Brain Science Institute, Korea Institute of Science and Technology (KIST), Seoul, 02792, South Korea.ORCID http://orcid.org/0000-0001-6559-0177
Young Jun Yoon *Brain Science Institute, Korea Institute of Science and Technology (KIST), Seoul, 02792, South Korea.
Jin Soo Park *Brain Science Institute, Korea Institute of Science and Technology (KIST), Seoul, 02792, South Korea.ORCID http://orcid.org/0000-0001-8218-0946
Dong-Hyun Kang *Micro/Nano Fabrication Center, KIST, Seoul, 02792, South Korea.ORCID http://orcid.org/0000-0001-8570-1145
Seung Min KwakMicro/Nano Fabrication Center, KIST, Seoul, 02792, South Korea.
Byung Chul LeeBrain Science Institute, Korea Institute of Science and Technology (KIST), Seoul, 02792, South Korea.ORCID http://orcid.org/0000-0002-7702-716X
Maesoon ImBrain Science Institute, Korea Institute of Science and Technology (KIST), Seoul, 02792, South Korea. maesoon.im@kist.re.kr.ORCID http://orcid.org/0000-0003-1152-4398
Korea Institute of Brain Science · KRKorea Advanced Nano Fab Center · KRKorea University · KR

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Out-of-plane microneedle structures are widely used in various applications such as transcutaneous drug delivery and neural signal recording for brain machine interface. This work presents a novel but simple method to fabricate high-density silicon (Si) microneedle arrays with various heights and diverse cross-sectional shapes depending on photomask pattern designs. The proposed fabrication method is composed of a single photolithography and two subsequent deep reactive ion etching (DRIE) steps. First, a photoresist layer was patterned on a Si substrate to define areas to be etched, which will eventually determine the final location and shape of each individual microneedle. Then, the 1st DRIE step created deep trenches with a highly anisotropic etching of the Si substrate. Subsequently, the photoresist was removed for more isotropic etching; the 2nd DRIE isolated and sharpened microneedles from the predefined trench structures. Depending on diverse photomask designs, the 2nd DRIE formed arrays of microneedles that have various height distributions, as well as diverse cross-sectional shapes across the substrate. With these simple steps, high-aspect ratio microneedles were created in the high density of up to 625 microneedles mm

Indexed as

Cross-sectional shapesDeep reactive ion etchingIsotropic etchMicroneedleVarious heights

Identifiers

PMID34888758
PMCPMC8656445
OpenAlexW4200396325

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.