ArticleSensors (Basel, Switzerland)2021
Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor.
Article in Sensors (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
3 citing papers in PubMed.
- Design and electromagnetic analysis of photonic crystal based microstrip patch antenna for next generation wireless systems.Scientific reports · 2026Article
- Recent Progress in Blood Flow Sensing.Sensors and actuators. A, Physical · 2025Article
- Fabrication and characterization of high-sensitivity, wide-range, and flexible MEMS thermal flow velocity sensors.Microsystems & nanoengineering · 2024Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
3 authors.
Funding
Abstract
Based on the results of computational fluid dynamics simulations, this study designed and fabricated a flexible thermal-type micro flow sensor comprising one microheater and two thermistors using a micro-electromechanical system (MEMS) process on a flexible polyimide film. The thermistors were connected to a Wheatstone bridge circuit, and the resistance difference between the thermistors resulting from the generation of a flow was converted into an output voltage signal using LabVIEW software. A mini tube flow test was conducted to demonstrate the sensor's detection of fluid velocity in gas and liquid flows. A good correlation was found between the experimental results and the simulation data. However, the results for the gas and liquid flows differed in that for gas, the output voltage increased with the fluid's velocity and decreased against the liquid's flow velocity. This study's MEMS-based flexible microthermal flow sensor achieved a resolution of 1.1 cm/s in a liquid flow and 0.64 cm/s in a gas flow, respectively, within a fluid flow velocity range of 0-40 cm/s. The sensor is suitable for many applications; however, with some adaptations to its electrical packaging, it will be particularly suitable for detecting biosignals in healthcare applications, including measuring respiration and body fluids.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.