ArticleMicromachines2021
Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared.
Qifeng Qiao et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
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ArticleMicromachines2021
Qifeng Qiao et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.