ArticleMaterials (Basel, Switzerland)2021
Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices.
Article in Materials (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed.
- Process Optimization and Characterization of Dielectric, Piezoelectric, and Ferroelectric Properties of 30% ScAlN Thin Films.Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society · 2026Article
- Giant piezoelectric response and electromechanical coupling in AlScN thin films via multi-scale lattice engineering.Nature communications · 2026Article
- High-Efficiency Wireless Power Transfer System Based on Low-Frequency AlScN Piezoelectric Micromechanical Ultrasonic Transducers for Implantable Medical Devices.Micromachines · 2025Article
- An AlScN Piezoelectric Micromechanical Ultrasonic Transducer-Based Power-Harvesting Device for Wireless Power Transmission.Micromachines · 2024Article
- Leakage Mechanism and Cycling Behavior of Ferroelectric AlMaterials (Basel, Switzerland) · 2024Article
- Stepped-Tube Backside Cavity Piezoelectric Ultrasound Transducer Based on ScMicromachines · 2023Article
- Doping Engineering for Optimizing Piezoelectric and Elastic Performance of AlN.Materials (Basel, Switzerland) · 2023Article
- A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications.Microsystems & nanoengineering · 2023Article
Corrections and comments
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Authors and funding
10 authors.
Funding
Abstract
In this work, we systematically studied the deposition, characterization, and crystal structure modeling of ScAlN thin film. Measurements of the piezoelectric device's relevant material properties, such as crystal structure, crystallographic orientation, and piezoelectric response, were performed to characterize the Sc
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Registered trials
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