ArticleSensors (Basel, Switzerland)2021
Noise Improvement of a-Si Microbolometers by the Post-Metal Annealing Process.
Article in Sensors (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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1 citing paper in PubMed, 15 citations in OpenAlex.
- Motion Blur Kernel Rendering Using an Inertial Sensor: Interpreting the Mechanism of a Thermal Detector.Sensors (Basel, Switzerland) · 2022Article
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4 authors at 3 institutions in 1 country.
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Abstract
To realize high-resolution thermal images with high quality, it is essential to improve the noise characteristics of the widely adopted uncooled microbolometers. In this work, we applied the post-metal annealing (PMA) process under the condition of deuterium forming gas, at 10 atm and 300 °C for 30 min, to reduce the noise level of amorphous-Si microbolometers. Here, the DC and temperature coefficient of resistance (TCR) measurements of the devices as well as
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