ArticleMicromachines2021
Transparent and Flexible Vibration Sensor Based on a Wheel-Shaped Hybrid Thin Membrane.
Article in Micromachines, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
1 citing paper in PubMed.
- Recent Progress of Structural Design, Fabrication Processes, and Applications of Flexible Acceleration Sensors.Sensors (Basel, Switzerland) · 2026Review
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
With the advent of human-machine interaction and the Internet of Things, wearable and flexible vibration sensors have been developed to detect human voices and surrounding vibrations transmitted to humans. However, previous wearable vibration sensors have limitations in the sensing performance, such as frequency response, linearity of sensitivity, and esthetics. In this study, a transparent and flexible vibration sensor was developed by incorporating organic/inorganic hybrid materials into ultrathin membranes. The sensor exhibited a linear and high sensitivity (20 mV/g) and a flat frequency response (80-3000 Hz), which are attributed to the wheel-shaped capacitive diaphragm structure fabricated by exploiting the high processability and low stiffness of the organic material SU-8 and the high conductivity of the inorganic material ITO. The sensor also has sufficient esthetics as a wearable device because of the high transparency of SU-8 and ITO. In addition, the temperature of the post-annealing process after ITO sputtering was optimized for the high transparency and conductivity. The fabricated sensor showed significant potential for use in transparent healthcare devices to monitor the vibrations transmitted from hand-held vibration tools and in a skin-attachable vocal sensor.
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