ArticleMicromachines2021
Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters.
Richard Syms et al.PubMed ↗Full text ↗Publisher ↗
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ArticleMicromachines2021
Richard Syms et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.