ArticleNature communications2021
Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators.
Article in Nature communications, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 10 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
10 citing papers in PubMed.
- Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology.Microsystems & nanoengineering · 2026Article
- Model-Driven Deep Learning Enables Speckle-Free Holography for 3D Parallel Nanofabrication.Research (Washington, D.C.) · 2026Article
- 3D-Printed MEMS in Italy.Micromachines · 2024Review
- Direct laser writing-enabled 3D printing strategies for microfluidic applications.Lab on a chip · 2024Review
- A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope.Microsystems & nanoengineering · 2024Article
- Micro- and nanofabrication of dynamic hydrogels with multichannel information.Nature communications · 2023Article
- Multiscale static and dynamic mechanical study of theJournal of the Royal Society, Interface · 2023Article
- Additive Manufactured Strain Sensor Using Stereolithography Method with Photopolymer Material.Polymers · 2023Article
- Rapid prototyping of a polymer MEMS droplet dispenser by laser-assisted 3D printing.Microsystems & nanoengineering · 2023Article
- Micro 3D printing of a functional MEMS accelerometer.Microsystems & nanoengineering · 2022Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
6 authors.
Funding
Abstract
The extreme miniaturization in NEMS resonators offers the possibility to reach an unprecedented resolution in high-performance mass sensing. These very low limits of detection are related to the combination of two factors: a small resonator mass and a high quality factor. The main drawback of NEMS is represented by the highly complex, multi-steps, and expensive fabrication processes. Several alternatives fabrication processes have been exploited, but they are still limited to MEMS range and very low-quality factor. Here we report the fabrication of rigid NEMS resonators with high-quality factors by a 3D printing approach. After a thermal step, we reach complex geometry printed devices composed of ceramic structures with high Young's modulus and low damping showing performances in line with silicon-based NEMS resonators ones. We demonstrate the possibility of rapid fabrication of NEMS devices that present an effective alternative to semiconducting resonators as highly sensitive mass and force sensors.
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.