ArticleNanomaterials (Basel, Switzerland)2021
Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography.
Article in Nanomaterials (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
7 citing papers in PubMed.
- A Single-Layer Full-Color Diffractive Waveguide by Lithography.Nanomaterials (Basel, Switzerland) · 2025Article
- Single 5-centimeter-aperture metalens enabled intelligent lightweight mid-infrared thermographic camera.Science advances · 2024Article
- UV-assisted nanoimprint lithography: the impact of the loading effect in silicon on nanoscale patterns of metalens.Nanoscale advances · 2024Article
- The Effect of Height Error on Performance of Propagation Phase-Based Metalens.Micromachines · 2024Article
- Pick and place process for uniform shrinking of 3D printed micro- and nano-architected materials.Nature communications · 2023Article
- UV-Nanoimprint and Deep Reactive Ion Etching of High Efficiency Silicon Metalenses: High Throughput at Low Cost with Excellent Resolution and Repeatability.Nanomaterials (Basel, Switzerland) · 2023Article
- Robustness Analysis of Metasurfaces: Perfect Structures Are Not Always the Best.ACS photonics · 2022Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
11 authors.
Funding
Abstract
This study presents the design and manufacture of metasurface lenses optimized for focusing light with 1.55 µm wavelength. The lenses are fabricated on silicon substrates using electron beam lithography, ultraviolet-nanoimprint lithography and cryogenic deep reactive-ion etching techniques. The designed metasurface makes use of the geometrical phase principle and consists of rectangular pillars with target dimensions of height h = 1200 nm, width w = 230 nm, length l = 354 nm and periodicity
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Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.