ArticleSensors (Basel, Switzerland)2021
ZnO Thin Films Growth Optimization for Piezoelectric Application.
Article in Sensors (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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Who cites it
3 citing papers in PubMed.
- Plasmon-Enhanced Piezo-Photocatalytic Degradation of Metronidazole Using Ag-Decorated ZnO Microtetrapods.Molecules (Basel, Switzerland) · 2025Article
- Effect of Al Incorporation on the Structural and Optical Properties of Sol-Gel AZO Thin Films.Materials (Basel, Switzerland) · 2023Article
- UV Sensor Based on Surface Acoustic Waves in ZnO/Fused Silica.Sensors (Basel, Switzerland) · 2023Article
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Authors and funding
13 authors.
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Abstract
The piezoelectric response of ZnO thin films in heterostructure-based devices is strictly related to their structure and morphology. We optimize the fabrication of piezoelectric ZnO to reduce its surface roughness, improving the crystalline quality, taking into consideration the role of the metal electrode underneath. The role of thermal treatments, as well as sputtering gas composition, is investigated by means of atomic force microscopy and x-ray diffraction. The results show an optimal reduction in surface roughness and at the same time a good crystalline quality when 75% O
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