A Two-Axis Piezoresistive Force Sensing Tool for Microgripping.

Force sensing has always been an important necessity in making decisions for manipulation. It becomes more appealing in the micro-scale context, especially where the surface forces become predominant. In addition, the deformations happening at the very local level are often coupled, and therefore providing multi-axis force sensing capabilities to microgripper becomes an important necessity. The manufacturing of a multi-axis instrumented microgripper comprises several levels of complexity, especially when it comes to the single wafer fabrication of a sensing and actuation mechanism. To address these requirements, in this work, an instrumented two-axis force sensing tool is proposed, which can then be integrated with the appropriate actuators for microgripping. Indeed, based on the task, the gripper design and shape requirements may differ. To cover wide needs, a versatile manufacturing strategy comprising of the separate fabrication of the passive and sensing parts was especially investigated. At the microscale, signal processing brings additional challenges, especially when we are dealing with multi-axis sensing. Therefore, a proper device, with efficient and appropriate systems and signal processing integration, is highly important. To keep these requirements in consideration, a dedicated clean-room based micro-fabrication of the devices and corresponding electronics to effectively process the signals are presented in this work. The fabricated sensing part can be assembled with wide varieties of passive parts to have different sensing tools as well as grippers. This force sensing tool is based upon the piezoresistive principle, and is experimentally demonstrated with a sensing capability up to 9 mN along the two axes with a resolution of 20