ReviewMicrosystems & nanoengineering2021
MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies.
Review in Microsystems & nanoengineering, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 15 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
15 citing papers in PubMed.
- On-chip 3D printing of metal microinductors for radio frequency electronics.Nature communications · 2026Article
- Solid Ethanol as a Renewable, Low-Toxicity, Electron-Beam Direct Write, and Biomedical Material.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Article
- A Double-Layer Parallel MEMS Inductor with Enhanced Current-Carrying Capacity and Thermal Stability.Micromachines · 2026Article
- "Tone-Arm" Neuromodulation MEMS Microcoil for In Vivo Imaging.Small (Weinheim an der Bergstrasse, Germany) · 2026Article
- Flexible Ferrite Magnetic Composite Films for Electromagnetic Applications.ACS materials Au · 2026Article
- Resonator Width Optimization for Enhanced Performance and Bonding Reliability in Wideband RF MEMS Filter.Micromachines · 2025Article
- Machine Learning-Driven Structural Optimization of a Bistable RF MEMS Switch for Enhanced RF Performance.Micromachines · 2025Article
- Micro-Coil Neuromodulation at Single-Cell and Circuit Levels for Inhibiting Natural Neuroactivity, Neutralizing Electric Neural Excitation, and Suppressing Seizures.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Analysis of Personalized Cardiovascular Drug Therapy: From Monitoring Technologies to Data Integration and Future Perspectives.Biosensors · 2025Review
- Self-adaptive rotational electromagnetic energy generation as an alternative to triboelectric and piezoelectric transductions.Communications engineering · 2024Article
- Mobile Data Gathering and Preliminary Analysis for the Functional Reach Test.Sensors (Basel, Switzerland) · 2024Article
- Nanofabricated high turn-density spiral coils for on-chip electromagneto-optical conversion.Microsystems & nanoengineering · 2024Article
- Extended Higher-Order Elements with Frequency-Doubled Parameters: The Hysteresis Loops Are Always of Type II.Sensors (Basel, Switzerland) · 2023Article
- The Impacts of Viscoelastic Behavior on Electrokinetic Energy Conversion for Jeffreys Fluid in Microtubes.Nanomaterials (Basel, Switzerland) · 2022Article
- FeZrN Films: Magnetic and Mechanical Properties Relative to the Phase-Structural State.Materials (Basel, Switzerland) · 2021Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
8 authors.
Funding
Abstract
MEMS inductors are used in a wide range of applications in micro- and nanotechnology, including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies set the boundary conditions for inductor design and their electrical and mechanical performance. This review provides a comprehensive overview of state-of-the-art MEMS technologies for inductor fabrication, presents recent advances in 3D additive fabrication technologies, and discusses the challenges and opportunities of MEMS inductors for two emerging applications, namely, integrated power electronics and neurotechnologies. Among the four top-down MEMS fabrication approaches, 3D surface micromachining and through-substrate-via (TSV) fabrication technology have been intensively studied to fabricate 3D inductors such as solenoid and toroid in-substrate TSV inductors. While 3D inductors are preferred for their high-quality factor, high power density, and low parasitic capacitance, in-substrate TSV inductors offer an additional unique advantage for 3D system integration and efficient thermal dissipation. These features make in-substrate TSV inductors promising to achieve the ultimate goal of monolithically integrated power converters. From another perspective, 3D bottom-up additive techniques such as ice lithography have great potential for fabricating inductors with geometries and specifications that are very challenging to achieve with established MEMS technologies. Finally, we discuss inspiring and emerging research opportunities for MEMS inductors.
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.