ArticleMicrosystems & nanoengineering2021
Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity.
Article in Microsystems & nanoengineering, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
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Who cites it
5 citing papers in PubMed, 19 citations in OpenAlex.
- Chip Calorimetry for Single-Cell Analysis: Advances, Challenges, and Opportunities.Sensors (Basel, Switzerland) · 2026Review
- AlScN Thin Films for the Piezoelectric Transduction of Suspended Microchannel Resonators.Sensors (Basel, Switzerland) · 2025Article
- Advanced operation of heated fluidic resonators via mechanical and thermal loss reduction in vacuum.Microsystems & nanoengineering · 2023Article
- Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator.Microsystems & nanoengineering · 2022Article
- Cellular and biomolecular detection based on suspended microchannel resonators.Biomedical engineering letters · 2021Review
Corrections and comments
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Authors and funding
4 authors at 3 institutions in 3 countries.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Calorimetry of single biological entities remains elusive. Suspended microchannel resonators (SMRs) offer excellent performance for real-time detection of various analytes and could hold the key to unlocking pico-calorimetry experiments. However, the typical readout techniques for SMRs are optical-based, and significant heat is dissipated in the sensor, altering the measurement and worsening the frequency noise. In this manuscript, we demonstrate for the first time full on-chip piezoelectric transduction of SMRs on which we focus a laser Doppler vibrometer to analyze its effect. We demonstrate that suddenly applying the laser to a water-filled SMR causes a resonance frequency shift, which we attribute to a local increase in temperature. When the procedure is repeated at increasing flow rates, the resonance frequency shift diminishes, indicating that convection plays an important role in cooling down the device and dissipating the heat induced by the laser. We also show that the frequency stability of the device is degraded by the laser source. In comparison to an optical readout scheme, a low-dissipative transduction method such as piezoelectricity shows greater potential to capture the thermal properties of single entities.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.