ArticleMicrosystems & nanoengineering2021
Fabrication of freestanding Pt nanowires for use as thermal anemometry probes in turbulence measurements.
Article in Microsystems & nanoengineering, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- A near-zero quiescent power breeze wake-up anemometer based on a rolling-bearing triboelectric nanogenerator.Microsystems & nanoengineering · 2024Article
- Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning.Microsystems & nanoengineering · 2023Article
Corrections and comments
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Authors and funding
6 authors.
Funding
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Abstract
We report a robust fabrication method for patterning freestanding Pt nanowires for use as thermal anemometry probes for small-scale turbulence measurements. Using e-beam lithography, high aspect ratio Pt nanowires (~300 nm width, ~70 µm length, ~100 nm thickness) were patterned on the surface of oxidized silicon (Si) wafers. Combining wet etching processes with dry etching processes, these Pt nanowires were successfully released, rendering them freestanding between two silicon dioxide (SiO
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Registered trials
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