ArticleMicrosystems & nanoengineering2021
Multiple-patterning colloidal lithography-implemented scalable manufacturing of heat-tolerant titanium nitride broadband absorbers in the visible to near-infrared.
Article in Microsystems & nanoengineering, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 14 papers.
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14 citing papers in PubMed.
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- Optimisation of Laser-Synthesized Heterostructured Multielement Nanoparticles for Solar Steam Generation and Water Purification.ACS applied materials & interfaces · 2026Article
- A Review: Grating Encoder Technologies for Multi-Degree-of-Freedom Spatial Measurement.Sensors (Basel, Switzerland) · 2025Review
- Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review.Micromachines · 2024Review
- Versatile Nanoring Fabrication Assisted by Hole-mask Colloidal Lithography.ACS applied materials & interfaces · 2024Article
- All-dielectric polarization-sensitive metasurface for terahertz polarimetric imaging.Scientific reports · 2024Article
- Perovskite Lanthanum-Doped Barium Stannate: A Refractory Near-Zero-Index Material for High-Temperature Energy Harvesting Systems.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- Colloidal self-assembly based ultrathin metasurface for perfect absorption across the entire visible spectrum.Nanophotonics (Berlin, Germany) · 2023Article
- Resist nanokirigami for multipurpose patterning.National science review · 2022Article
- An Infrared Ultra-Broadband Absorber Based on MIM Structure.Nanomaterials (Basel, Switzerland) · 2022Article
- Gap-plasmon-driven spin angular momentum selection of chiral metasurfaces for intensity-tunable metaholography working at visible frequencies.Nanophotonics (Berlin, Germany) · 2022Article
- Nanoimprint lithography for high-throughput fabrication of metasurfaces.Frontiers of optoelectronics · 2021Review
- Monolithic integration of nanorod arrays on microfluidic chips for fast and sensitive one-step immunoassays.Microsystems & nanoengineering · 2021Article
- Solution-processable electrode-material embedding in dynamically inscribed nanopatterns (SPEEDIN) for continuous fabrication of durable flexible devices.Microsystems & nanoengineering · 2021Article
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Authors and funding
7 authors.
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No grant is acknowledged in the PubMed record.
Abstract
Broadband perfect absorbers have been intensively researched for decades because of their near-perfect absorption optical property that can be applied to diverse applications. Unfortunately, achieving large-scale and heat-tolerant absorbers has been remained challenging work because of costly and time-consuming lithography methods and thermolability of materials, respectively. Here, we demonstrate a thermally robust titanium nitride broadband absorber with >95% absorption efficiency in the visible and near-infrared region (400-900 nm). A relatively large-scale (2.5 cm × 2.5 cm) absorber device is fabricated by using a fabrication technique of multiple-patterning colloidal lithography. The optical properties of the absorber are still maintained even after heating at the temperatures >600
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