ArticleMicrosystems & nanoengineering2021
Demonstration of tantalum as a structural material for MEMS thermal actuators.
Article in Microsystems & nanoengineering, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
2 citing papers in PubMed.
- Machine learning-driven metastructure design for sensor-free linearization of MEMS electrothermal actuators.Microsystems & nanoengineering · 2025Article
- The Influence of Thermal Annealing on the Chemical Composition, Nanomechanical, and Nanotribological Properties of Tantalum Thin Films.Micromachines · 2025Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
3 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
This work demonstrates the processing, modeling, and characterization of nanocrystalline refractory metal tantalum (Ta) as a new structural material for microelectromechanical system (MEMS) thermal actuators (TAs). Nanocrystalline Ta films have a coefficient of thermal expansion (CTE) and Young's modulus comparable to bulk Ta but an approximately ten times greater yield strength. The mechanical properties and grain size remain stable after annealing at temperatures as high as 1000 °C. Ta has a high melting temperature (
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.