ReviewMicrosystems & nanoengineering2020
Thermal scanning probe lithography-a review.
Review in Microsystems & nanoengineering, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 35 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
35 citing papers in PubMed.
- Printing Beyond Fabrication: A Physicochemical Vision for Emerging Device Technologies.ACS physical chemistry Au · 2026Review
- Optical Fourier Surfaces for Integrated Photonics.ACS nano · 2026Article
- Direct resist-free patterning of an organic semiconductor via thermal scanning probe lithography.Discover nano · 2026Article
- Quantitative mapping of smooth topographic landscapes generated using thermal scanning-probe lithography.Nature protocols · 2026Review
- Strained 2D Semiconductor Lateral Heterojunctions via Grayscale Thermal-Scanning Probe Lithography.Small science · 2026Article
- Thermochemical Nanolithography and Hot-Plate Heating of 2D MoSThe journal of physical chemistry letters · 2026Article
- Beyond binary patterning: polypropylene carbonate as a versatile thermal resist for high-fidelity grayscale Nanofabrication.Microsystems & nanoengineering · 2026Article
- Advances in waveguide to waveguide couplers for 3D integrated photonic packaging.Light, science & applications · 2026Review
- A Versatile Materials Class for Solution-Processed Optics and Photonics Based On Titanium Oxide Hydrates and Polyalcohols: A Perspective.Advanced materials (Deerfield Beach, Fla.) · 2026Article
- Advancing nanolithography: a comprehensive review of materials for local anodic oxidation with AFM.Beilstein journal of nanotechnology · 2026Review
- Gradient Electronic Landscapes in van der Waals Heterostructures.Nano letters · 2025Article
- Atomic Force Microscopy for Cross-Disciplinary Materials Research.Small methods · 2025Review
- Engineering multifunctional surface topography to regulate multiple biological responses.Biomaterials · 2025Review
- Nanofabrication of all-dielectric metasurfaces through pulsed thermal scanning probe lithography.Scientific reports · 2025Article
- Review on Carbon-Based Micro and Nano Electro-Mechanical Systems for Biotechnological Application.Recent patents on nanotechnology · 2025Review
- Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review.Micromachines · 2024Review
- Multi- and Gray-Scale Thermal Lithography of Silk Fibroin as Water-Developable Resist for Micro and Nanofabrication.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- Switchable tribology of ferroelectrics.Nature communications · 2024Article
- Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification.Microsystems & nanoengineering · 2024Article
- Advances in lithographic techniques for precision nanostructure fabrication in biomedical applications.Discover nano · 2023Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Fundamental aspects and state-of-the-art results of thermal scanning probe lithography (t-SPL) are reviewed here. t-SPL is an emerging direct-write nanolithography method with many unique properties which enable original or improved nano-patterning in application fields ranging from quantum technologies to material science. In particular, ultrafast and highly localized thermal processing of surfaces can be achieved through the sharp heated tip in t-SPL to generate high-resolution patterns. We investigate t-SPL as a means of generating three types of material interaction: removal, conversion, and addition. Each of these categories is illustrated with process parameters and application examples, as well as their respective opportunities and challenges. Our intention is to provide a knowledge base of t-SPL capabilities and current limitations and to guide nanoengineers to the best-fitting approach of t-SPL for their challenges in nanofabrication or material science. Many potential applications of nanoscale modifications with thermal probes still wait to be explored, in particular when one can utilize the inherently ultrahigh heating and cooling rates.
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What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.