ArticleLight, science & applications2021
Nano-precision metrology of X-ray mirrors with laser speckle angular measurement.
Article in Light, science & applications, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
What it found
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Who cites it
5 citing papers in PubMed.
- Speckle-based curvature optical metrology.Light, science & applications · 2026Article
- Development of an advanced in-line multilayer deposition system at Diamond Light Source.Journal of synchrotron radiation · 2024Article
- Ion beam figuring for X-ray mirrors: history, state-of-the-art and future prospects.Journal of synchrotron radiation · 2024Article
- Sub-nanometre quality X-ray mirrors created using ion beam figuring.Journal of synchrotron radiation · 2024Article
- Noninvasive evaluation of the skin barrier in reconstructed human epidermis using speckle analysis: Correlation with Raman microspectroscopy.Skin research and technology : official journal of International Society for Bioengineering and the Skin (ISBS) [and] International Society for Digital Imaging of Skin (ISDIS) [and] International Society for Skin Imaging (ISSI) · 2024Article
Corrections and comments
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Authors and funding
3 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
X-ray mirrors are widely used for synchrotron radiation, free-electron lasers, and astronomical telescopes. The short wavelength and grazing incidence impose strict limits on the permissible slope error. Advanced polishing techniques have already produced mirrors with slope errors below 50 nrad root mean square (rms), but existing metrology techniques struggle to measure them. Here, we describe a laser speckle angular measurement (SAM) approach to overcome such limitations. We also demonstrate that the angular precision of slope error measurements can be pushed down to 20nrad rms by utilizing an advanced sub-pixel tracking algorithm. Furthermore, SAM allows the measurement of mirrors in two dimensions with radii of curvature as low as a few hundred millimeters. Importantly, the instrument based on SAM is compact, low-cost, and easy to integrate with most other existing X-ray mirror metrology instruments, such as the long trace profiler (LTP) and nanometer optical metrology (NOM). The proposed nanometrology method represents an important milestone and potentially opens up new possibilities to develop next-generation super-polished X-ray mirrors, which will advance the development of X-ray nanoprobes, coherence preservation, and astronomical physics.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.