Evidence map›Paper›PMID 34500943›Full record

ArticleMaterials (Basel, Switzerland)2021

Towards Scalable Large-Area Pulsed Laser Deposition.

Zakhar Vakulov, Daniil Khakhulin, Evgeny Zamburg, Alexander Mikhaylichenko, Vladimir A Smirnov, Roman Tominov, Viktor S Klimin, Oleg A Ageev

Open access · goldAbstract read
In one paragraph

Article in Materials (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 9 papers.

0numbers the graph read from it
0cells of the map it votes in
9citing papers in PubMed
3.2field-weighted citation impact, top 8% of its field
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

9 citing papers in PubMed, 33 citations in OpenAlex.

  1. Article
  2. Recent Advances in Pulsed Laser Deposition of REBaMaterials (Basel, Switzerland) · 2025
    Review
  3. Review
  4. Review
  5. A practical guide to pulsed laser deposition.Chemical Society reviews · 2023
    Review
  6. PLD plasma plume analysis: a summary of the PSI contribution.Applied physics. A, Materials science & processing · 2023
    Article
  7. SAW Hydrogen Sensors with Pd/SnOMaterials (Basel, Switzerland) · 2022
    Article
  8. Article
  9. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors at 3 institutions in 2 countries.

Zakhar VakulovFederal Research Centre, Southern Scientific Centre of the Russian Academy of Sciences (SSC RAS), 41 Chekhov St., 344006 Rostov-on-Don, Russia.ORCID 0000-0003-3084-4522
Daniil KhakhulinResearch Laboratory of Functional Nanomaterials Technology, Southern Federal University, 2 Shevchenko St., 347922 Taganrog, Russia.
Evgeny ZamburgDepartment of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117583, Singapore.
Alexander MikhaylichenkoFORS Development Center, 3, Trifonovskiy Tupik, 129272 Moscow, Russia.
Vladimir A SmirnovInstitute of Nanotechnologies, Electronics and Equipment Engineering, Southern Federal University, 2 Shevchenko St., 347922 Taganrog, Russia.ORCID 0000-0001-7130-2194
Roman TominovInstitute of Nanotechnologies, Electronics and Equipment Engineering, Southern Federal University, 2 Shevchenko St., 347922 Taganrog, Russia.
Viktor S KliminInstitute of Nanotechnologies, Electronics and Equipment Engineering, Southern Federal University, 2 Shevchenko St., 347922 Taganrog, Russia.
Oleg A AgeevInstitute of Nanotechnologies, Electronics and Equipment Engineering, Southern Federal University, 2 Shevchenko St., 347922 Taganrog, Russia.ORCID 0000-0003-1755-5371
Southern Federal University · RUNational University of Singapore · SGRussian Academy of Sciences · RU

Funding

Council on grants of the President of the Russian Federation МК-6252.2021.4Russian Foundation for Basic Research 19-29-03041 mkRussian Foundation for Basic Research 19-37-90139Russian Foundation for Basic Research 19-38-60052Russian Scientific Foundation 20-69-46076
6 · The paper itself

Abstract

One of the significant limitations of the pulsed laser deposition method in the mass-production-technologies of micro- and nanoelectronic and molecular device electronic fabrication is the issue of ensuring deposition of films with uniform thickness on substrates with large diameter (more than 100 mm) since the area of the laser spot (1-5 mm

Indexed as

ablationcomputer simulationlarge-area depositionlithium niobatemetal oxidesnanomaterialspulsed laser depositionthickness uniformitythin films

Identifiers

PMID34500943
PMCPMC8432691
OpenAlexW3194771936

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.