ArticleAdvanced materials (Deerfield Beach, Fla.)2021
Wafer-Scale Functional Metasurfaces for Mid-Infrared Photonics and Biosensing.
Article in Advanced materials (Deerfield Beach, Fla.), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 50 papers.
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Who cites it
50 citing papers in PubMed.
- Electrically switchable dual-focus metalens for depth-extended in vivo photoacoustic imaging of ophthalmic vascular disease.Light, science & applications · 2026Article
- Bound States in the Continuum Metasurfaces for Biomolecular Detection: A Review of Advances and Applications.Advanced materials (Deerfield Beach, Fla.) · 2026Review
- Direct imaging-based gradient metasurface sensor enabling spectrometer-free ultrasensitive biomolecule detection.Nature communications · 2026Article
- Freestanding Polymer Metasurface Supporting Higher-Order Optical Resonances for Strong Field Enhancement in TMD Monolayers.Small (Weinheim an der Bergstrasse, Germany) · 2026Article
- Wafer-Scale All-Dielectric Quasi-BIC Metasurfaces: Bridging High-Throughput Deep-UV Lithography with Nanophotonic Applications.Nano letters · 2026Article
- Transfer, integration, and inverse design of metasurfaces in suspended membranes.Moore and more · 2026Article
- A Review of Solid-State LiDAR Principles and Metasurface-Based LiDAR Sensors.Sensors (Basel, Switzerland) · 2025Review
- Mass-Manufactured Gradient Plasmonic Metasurfaces for Enhanced Mid-IR Spectrochemical Analysis of Complex Biofluids.Advanced materials (Deerfield Beach, Fla.) · 2025Article
- Production-Ready Double-Sided Fabrication of Dual-Band Infrared Metaoptics Using Deep-Ultraviolet Lithography.ACS nano · 2025Article
- Review for optical metalens based on metasurfaces: fabrication and applications.Microsystems & nanoengineering · 2025Review
- Nanoplasmonic Infrared Microarray Sensor Enabling Structural Protein Biomarker-Based Drug Screening for Neurodegenerative Diseases.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Water-Immersed GaP Huygens' Meta-Optics for Visible Structured Light Generation.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Low-loss phase change materials-based reprogrammable non-volatile 1 × 2 switch on integrated metasurfaces.iScience · 2025Article
- Enhanced biochemical sensing with high-Q transmission resonances in free-standing membrane metasurfaces.Optica · 2025Article
- Ultrasensitive infrared spectroscopy via vibrational modulation of plasmonic scattering from a nanocavity.Science advances · 2024Article
- Trapping light in air with membrane metasurfaces for vibrational strong coupling.Nature communications · 2024Article
- Data-Driven Materials Research and Development for Functional Coatings.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Review
- Meta-Attention Deep Learning for Smart Development of Metasurface Sensors.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- Large-scale fabrication of meta-axicon with circular polarization on CMOS platform.Nanophotonics (Berlin, Germany) · 2024Article
- Nonlinear mid-infrared meta-membranes.Nanophotonics (Berlin, Germany) · 2024Article
Corrections and comments
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Authors and funding
5 authors.
Funding
Abstract
Metasurfaces have emerged as a breakthrough platform for manipulating light at the nanoscale and enabling on-demand optical functionalities for next-generation biosensing, imaging, and light-generating photonic devices. However, translating this technology to practical applications requires low-cost and high-throughput fabrication methods. Due to the limited choice of materials with suitable optical properties, it is particularly challenging to produce metasurfaces for the technologically relevant mid-infrared spectral range. These constraints are overcome by realizing functional metasurfaces on almost completely transparent free-standing metal-oxide membranes. A versatile nanofabrication process is developed and implemented for highly efficient dielectric and plasmonic mid-infrared metasurfaces with wafer-scale and complementary metal-oxide-semiconductor (CMOS)-compatible manufacturing techniques. The advantages of this method are revealed by demonstrating highly uniform and functional metasurfaces, including high-Q structures enabling fine spectral selectivity, large-area metalenses with diffraction-limited focusing capabilities, and birefringent metasurfaces providing polarization control at record-high conversion efficiencies. Aluminum plasmonic devices and their integration into microfluidics for real-time and label-free mid-infrared biosensing of proteins and lipid vesicles are further demonstrated. The versatility of this approach and its compatibility with mass-production processes bring infrared metasurfaces markedly closer to commercial applications, such as thermal imaging, spectroscopy, and biosensing.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.