ArticleSensors (Basel, Switzerland)2021
Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles.
Article in Sensors (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
1 citing paper in PubMed, 14 citations in OpenAlex.
- Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric CoefficientsMicromachines · 2022Article
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Authors and funding
7 authors at 3 institutions in 1 country.
Funding
Abstract
The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for numerous optoelectronic applications. However, the existing actuation strategies are severely limited for poor compatibility with CMOS process, non-linear control, insufficient mirror size and small angular travel. In this paper, a novel, particularly efficient ScAlN-based piezoelectric MEMS mirror with a pupil size of 10 mm is presented. The MEMS mirror consists of a reflection mirror plate, four meandering springs with mechanical rotation transformation, and eight right-angle trapezoidal actuators designed in Union Jack-shaped form. Theoretical modeling, simulations and comparative analysis have been investigated for optimizing two different device designs. For Device A with a 1 mm-length square mirror, the orthogonal and diagonal static tilting angles are ±36.2°@200 V
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Registered trials
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